DEEP Clean S100 Dissolve Epi Exhaust
Polymer DEEP Clean S100 is a specialty
cleaning formulation designed for quick,
effective clean-up of silicon EPIi
S100 provides an effective alternative to HF
acid cleaning. Chamber, exhaust, and
scrubber components can be effectively
cleaned at normal maintenance cycles using
DEEP Clean S100. S100 is designed to be
non-gelling and low foaming for quick,
The formulation is designed to dissolve the
epi exhaust polymer that builds up between
maintenance cycles on silicon epi deposition
equipment. S100 is a proprietary blend
including fluorine salts, surfactants,
wetting agents, and reaction inhibitors.
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