Features & Benefits

·         The Computer Managed Reticle Storage System (SCMSSM-R-200-400-E) is designed to store, monitor and track up to 400 reticles.

·         This system is a computer-based, reticle storage system with manual reticle retrieval.

·         This system consists of two major portions: computer storage management system, and storage rack system.

·         Computer storage management system records, monitors and updates the information about the reticles in the storage in real time. It has a user friendly GUI for operator input. It also controls indicators to aid operator to identify the storage location.

·         Storage rack system has ESD safe compartment for reticle storage. Reticle box rests directly in the compartment. Each unit has a light, which provides the visual indication to help operator to locate the source/target location. 

·         Two rack systems are put together in back-to-back configuration, operator access the reticle storage compartments from left or right side. Computer screen is at front.

·         Computer tells the location and turns on the indicator, while operator manually inserts or retrieves reticle box.

·         Rack systems are completely sealed with magnetically latched doors, with optional humidity control and temperature display.

·         All software and data are secured and password protected.

·         WIP tracking.

·         Programmable reticle storage location.

·         Class 100 clean room compatible.

·         System is movable (on four casters)

·         This series machines are designed to reduce/eliminate particle generation by using clean room compatible components.

·         High quality laser barcode reader is included.