G2 Automated Technologies, LLC. offers a full line of vacuum flange assemblies and products for Atmospheric and LPCVD applications.  Whether your process is Poly Silicon, Silicon Nitride, Teos, or Low Temperature Thermal Anneals, we have flanges to meet your requirements.

G2 Automated Technologies, LLC. has a perfect addition to your rear flange-  a removable back plate.  You no longer have to compromise the flange vacuum seal in order to have access to the rear of your chamber. Our removable back plates make maintenance easier for removing process liners, injectors, and vacuum componenets.

Each back plate can be designed, process specific, to accommodate the exact profile TC and internal injector positions required for process tubes with and without liners.

Our back plates can adapt to almost any vacuum connection: ISO, KF, BALL SOCKETS, Etc.

Do different injector locations confuse your technicians?  Do you have a single port rear plates used with a liner and without?  We will engrave your back plate with a specific process name or furnace name at your request to eliminate any assembly errors during maintenance.

How Do You Seal Your Profile TC and Injectors?
Stainless Steel Ultra-Torr Fittings create a great vacuum seal for LPCVD systems.  They are commonly used in applications where fixed positioning of the profile TC is performed manually on each furnace.  They are also commonly used on applications where more than one TC or Injector are clustered together in a tight area.


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Thank you for taking the time to visit the VACUUM FLANGE & END CAP PARTS section of our website.  In this section you will find a complete listing of our VACUUM FLANGE & END CAP PARTS products. 



 
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Need a budgetary quotation?  Please don't hesitate to contact G2.  We have never claimed to be the cheapest, however our products are the most reliable & accurate products on the market.  With a warranty like no other.



G2 Automated Technologies, LLC.
10500 Metric Dr Bldg 122
Dallas, Texas 75243

Toll-free: 1-866-6-G2ATEC
Phone: 972-479-0699
Fax: 972-479-0717

E-mail: sales@g2automatedtechnologies.com