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G2 Automated Technologies, LLC. offers a
full line of vacuum flange assemblies and
products for Atmospheric and LPCVD
applications. Whether your process is
Poly Silicon, Silicon Nitride, Teos, or Low
Temperature Thermal Anneals, we have flanges
to meet your requirements.
G2 Automated Technologies, LLC. has a
perfect addition to your rear flange-
a removable back plate. You no longer
have to compromise the flange vacuum seal in
order to have access to the rear of your
chamber. Our removable back plates make
maintenance easier for removing process
liners, injectors, and vacuum componenets.
Each back plate can be designed, process
specific, to accommodate the exact profile
TC and internal injector positions required
for process tubes with and without liners.
Our back plates can adapt to almost any
vacuum connection: ISO, KF, BALL SOCKETS,
Etc.
Do different injector locations confuse your
technicians? Do you have a single port
rear plates used with a liner and without?
We will engrave your back plate with a
specific process name or furnace name at
your request to eliminate any assembly
errors during maintenance.
How Do You Seal Your Profile TC and
Injectors?
Stainless Steel Ultra-Torr Fittings create a
great vacuum seal for LPCVD systems.
They are commonly used in applications where
fixed positioning of the profile TC is
performed manually on each furnace.
They are also commonly used on applications
where more than one TC or Injector are
clustered together in a tight area.
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Thank you for taking the time to visit the
VACUUM FLANGE & END CAP PARTS
section of our website. In this section you
will find a complete listing of our
VACUUM FLANGE & END CAP PARTS products.
 Click
Here To Request A Quote...
Need a budgetary quotation? Please
don't hesitate to contact G2. We
have never claimed to be the cheapest,
however our products are the most reliable
& accurate products on the market.
With a warranty like no other.
G2 Automated Technologies, LLC.
903 N. Bowser Ste. 300
Richardson, Texas 75081
Toll-free: 1-866-6-G2ATEC
Phone: 972-479-0699
Fax: 972-479-0717
E-mail:
sales@g2automatedtechnologies.com
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