WAFER DEMOUNT TOOL / STATION

• Wafer Demount Tool Description:

  Wafer Demount System is designed to load a 25 Wafer Plastic Cassette from a Wafer Polishing Disc. The  operator will first place a polishing disk with 3 (200mm) wafers onto a manual lazy suzan, along with loading a empty 25 Wafer Cassette onto the platform. The platform has cassette placement sensors to ensure proper placement.  If the cassette is not loading properly the system will give a error light.  The operator will then line one (1) wafer up to the DI water channel then press a foot switch that will shoot a stream of water onto a wafer, which will then loosing the wafer from the polishing pad placement cut out.  The wafer will then guide on a bed of DI Water from the polishing disk into a plastic cassette.  The operator will then index to the next slot until a full 25 wafer load is complete.  Once system has loaded all 25 wafers the operator will then press a button allowing the plastic wafer cassette to be removed from the DI Water.

   

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PURPOSE OF SYSTEM:

Reduce Particle During Demounting Of Wafers From Polishing Disc Into 25 Wafer Plastic Cassette.

Allow Wafer Cassette to stay submereged in DI Water during Demount

Construction Of System:

304 Stainless Steel Frame

White Polypropylene

Black Delrin

Black Hard Anodized Aluminum

Stainless Steel Hardware

Components:

Wafer Demount Indexing System

Wafer Cassette PP Tank

Stainless Steel Stand

Water Proof Foot Switch

Lexan Splash Guard

Pumps/Recircluating

Leveling Feet

ALL BUTTON AND BOAT SWITCHES ARE WATERPROOF

Spray Nozzles

Facility Requirements:

110-220 V.A.C.  50-60 Hertz

75-80 PSI C.D.A

Warranty:

1 Year Parts & Labor